In-Line Sputtered Gallium and Aluminum Codoped Zinc Oxide Films for Organic Solar Cells

Table 2

Comparison of reported GAZO films on deposition method and electrical and optical properties.

Number	Year	Author(s)	Deposition method	Target(s)	Lowest resistivity (10^−4 Ω-cm)	Highest average optical transmittance in visible region (%)	References
1	2009	Shin et al.	Pulsed laser deposition	GAZO	2.18	85	[13]
2	2010	Kang et al.	cosputtering	GZO + AZO	21.4	90	[10]
3	2012	Lin et al.	cosputtering	GZO + Al sheet	8.14	>80	[14]
4	2013	Kim et al.	Facing targets sputtering	GZO + AZO	11.86	90	[15]
5	2014	Hong et al.	Facing targets sputtering	GZO + AZO	8.9	85	[2]
6	2014	Chang (this work)	In-line sputtering	GAZO	4.3	92	—