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Journal of Nanomaterials
Volume 2009 (2009), Article ID 851290, 5 pages
Research Article

Growth of Pd-Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

1Nano High-Tech Research Center, Toyota Technological Institute, 2-12-1 Hisakata, Tempaku, Nagoya 468-8511, Japan
2Daido Bunseki Research Inc., 2-30 Daido-cho, Minato-ku, Nagoya 457-8545, Japan

Received 31 October 2008; Revised 14 February 2009; Accepted 16 February 2009

Academic Editor: Rakesh Joshi

Copyright © 2009 Tomokazu Sakamoto et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We have synthesized Pd-filled carbon nanotubes (CNTs) oriented perpendicular to Si substrates using a microwave plasma-enhanced chemical vapor deposition (MPECVD) for the application of scanning probe microscopy (SPM) tip. Prior to the CVD growth, Al thin film (10 nm) was coated on the substrate as a buffer layer followed by depositing a  nm-thick Pd film as a catalyst. The diameter and areal density of CNTs grown depend largely on the initial Pd thickness. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images clearly show that Pd is successfully encapsulated into the CNTs, probably leading to higher conductivity. Using optimum growth conditions, Pd-filled CNTs are successfully grown on the apex of the conventional SPM cantilever.