Rakesh K. Joshi

Ashok Kumar

Diamond and Related Nanomaterials for MEMS/NEMS Applications

The mechanical strength and mixed mode I/II fracture toughness of hydrogen-free tetrahedral amorphous diamond-like carbon (ta-C) films, grown by pulsed laser deposition, are discussed in connection to material flaws and its microstructure. The failure properties of ta-C were obtained from films with thicknesses 0.5–3 <svg style="vertical-align:-3.56265pt;width:9.5625px;" id="M1" height="12.175" version="1.1" viewBox="0 0 9.5625 12.175" width="9.5625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path id="x1D707" d="M538 96q-38 -45 -84 -76.5t-71 -31.5q-44 0 -15 117q12 49 18 89h-2q-99 -128 -163 -178q-36 -28 -70 -28q-26 0 -44 38h-2q-16 -69 -16 -129q0 -43 11 -75.5t24 -42.5l1 -6q-7 -12 -24.5 -23t-37.5 -11q-40 0 -40 76q0 52 35 202l94 407l78 24l5 -5q-32 -122 -72 -310&#xA;q-7 -33 0 -55t25 -22q36 0 105.5 75t107.5 145l32 146l75 26h10q-50 -197 -78 -347q-7 -38 6 -38q7 0 31 17t47 39z" /></g></svg>m and specimen widths 10–20 <svg style="vertical-align:-3.56265pt;width:9.5625px;" id="M2" height="12.175" version="1.1" viewBox="0 0 9.5625 12.175" width="9.5625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,7.675)"><use xlink:href="#x1D707" /></g></svg>m. The smallest test samples with 10 <svg style="vertical-align:-3.56265pt;width:9.5625px;" id="M3" height="12.175" version="1.1" viewBox="0 0 9.5625 12.175" width="9.5625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,7.675)"><use xlink:href="#x1D707" /></g></svg>m gage section averaged a strength of 7.3 <svg style="vertical-align:-0.3003pt;width:10.1px;" id="M4" height="9.5625" version="1.1" viewBox="0 0 10.1 9.5625" width="10.1" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,9.125)"><path id="xB1" d="M535 290h-212v-206h-58v206h-213v50h213v193h58v-193h212v-50zM535 -22h-483v50h483v-50z" /></g></svg> 1.2 GPa, while the strength of 20-<svg style="vertical-align:-3.56265pt;width:9.5625px;" id="M5" height="12.175" version="1.1" viewBox="0 0 9.5625 12.175" width="9.5625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,7.675)"><use xlink:href="#x1D707" /></g></svg>m specimens with thicknesses 0.5–3 <svg style="vertical-align:-3.56265pt;width:9.5625px;" id="M6" height="12.175" version="1.1" viewBox="0 0 9.5625 12.175" width="9.5625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,7.675)"><use xlink:href="#x1D707" /></g></svg>m varied between 2.2–5.7 GPa. The scaling of the mechanical strength with specimen thickness and dimensions was owed to deposition-induced surface flaws, and, only in the smallest specimens, RIE patterning generated specimen sidewall flaws. The mode I fracture toughness of ta-C films is <svg style="vertical-align:-3.3907pt;width:162.8625px;" id="M7" height="18.424999" version="1.1" viewBox="0 0 162.8625 18.424999" width="162.8625" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.017,-0,0,-.017,.062,14.138)"><path id="x1D43E" d="M764 650l-7 -26q-61 -10 -91.5 -22.5t-76.5 -48.5l-235 -184q104 -152 208 -276q31 -37 54.5 -48.5t68.5 -16.5l-7 -28h-156q-138 170 -213 284q-19 29 -33.5 35t-33.5 -7l-29 -173q-15 -75 -5.5 -90.5t74.5 -20.5l-5 -28h-260l7 28q58 5 74 21.5t30 89.5l70 378&#xA;q12 68 2 83t-72 22l6 28h257l-7 -28q-62 -7 -76 -21.5t-27 -83.5l-32 -172q29 11 78 46q112 84 217 179q18 16 23.5 25.5t-1 14.5t-26.5 8l-30 4l5 28h249z" /></g><g transform="matrix(.012,-0,0,-.012,13.25,18.212)"><path id="x1D43C" d="M414 650l-6 -28q-63 -4 -78.5 -17.5t-27.5 -71.5l-77 -416q-11 -58 0.5 -71.5t77.5 -17.5l-5 -28h-275l8 28q63 4 79.5 18.5t27.5 70.5l80 416q11 57 -2 71t-81 18l6 28h273z" /></g><g transform="matrix(.012,-0,0,-.012,18.45,18.212)"><path id="x1D450" d="M383 397q0 -32 -35 -49q-12 -6 -23 8q-37 45 -84 45t-90 -71q-40 -65 -40 -167q0 -57 22 -86t59 -29q38 0 81.5 24.5t69.5 51.5l16 -21q-44 -53 -104 -84t-109 -31q-56 0 -89.5 41t-33.5 117q0 61 30 124t79 105q33 28 81 50.5t86 22.5q34 0 59 -15.5t25 -35.5z" /></g><g transform="matrix(.017,-0,0,-.017,135.887,12.862)"><path id="x221A" d="M782 703l-309 -950l-231 505l-91 -47l-18 35l147 78l194 -431h2l264 810h42z" /></g><g transform="matrix(.017,-0,0,-.017,28.625,14.138)"><path id="x3D" d="M535 323h-483v50h483v-50zM535 138h-483v50h483v-50z" /></g><g transform="matrix(.017,-0,0,-.017,43.312,14.138)"><path id="x34" d="M456 178h-96v-72q0 -51 12.5 -62.5t72.5 -16.5v-27h-256v27q65 5 78 17t13 62v72h-260v28q182 271 300 426h40v-407h96v-47zM280 225v295h-2q-107 -148 -196 -295h198z" /></g><g transform="matrix(.017,-0,0,-.017,51.471,14.138)"><path id="x2E" d="M113 -12q-24 0 -39.5 16t-15.5 42q0 24 16 40.5t40 16.5t40 -16.5t16 -40.5q0 -26 -16 -42t-41 -16z" /></g><g transform="matrix(.017,-0,0,-.017,55.347,14.138)"><use xlink:href="#x34" /></g><g transform="matrix(.017,-0,0,-.017,67.297,14.138)"><use xlink:href="#xB1" /></g><g transform="matrix(.017,-0,0,-.017,81.049,14.138)"><path id="x30" d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105&#xA;q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" /></g><g transform="matrix(.017,-0,0,-.017,89.209,14.138)"><use xlink:href="#x2E" /></g><g transform="matrix(.017,-0,0,-.017,93.084,14.138)"><use xlink:href="#x34" /></g><g transform="matrix(.017,-0,0,-.017,104.082,14.138)"><path id="x4D" d="M861 0h-263v28q61 5 73 22t12 97l-4 408h-4l-244 -548h-20l-224 534h-2l-15 -285q-5 -98 -3 -166q1 -34 19.5 -45t72.5 -17v-28h-233v28q45 5 62.5 17t22.5 43q11 65 19 183l14 208q3 36 3.5 55t-2.5 37.5t-6.5 25t-16.5 13t-25.5 8t-39.5 4.5v28h164l228 -501l232 501&#xA;h170v-28q-68 -6 -81 -21.5t-11 -91.5l9 -362q2 -80 15 -97t78 -22v-28z" /></g><g transform="matrix(.017,-0,0,-.017,119.228,14.138)"><path id="x50" d="M46 650h247q112 0 169 -41q64 -49 64 -141q0 -91 -56.5 -143t-138.5 -62q-23 -3 -45 -1l-74 19v-157q0 -63 15.5 -77t83.5 -19v-28h-271v28q60 5 74 20t14 77v400q0 65 -12.5 79t-69.5 18v28zM212 559v-245q31 -12 73 -12q59 0 102 38t43 124q0 77 -42.5 115.5&#xA;t-108.5 38.5q-44 0 -56 -12q-11 -8 -11 -47z" /></g><g transform="matrix(.017,-0,0,-.017,128.442,14.138)"><path id="x61" d="M433 39l-85 -51q-27 0 -47 20q-16 16 -24 44q-5 -3 -24 -16.5t-27 -18.5t-23 -13.5t-25 -12t-19 -3.5q-52 0 -86 36.5t-34 85.5q0 71 81 99q128 43 155 65v17q0 54 -23 83.5t-62 29.5q-28 0 -45 -19t-29 -66q-7 -23 -29 -23q-15 0 -29 13t-14 30t31 40q25 19 68.5 40.5&#xA;t81.5 29.5q49 0 82 -27q45 -39 45 -123v-185q0 -60 35 -60q18 0 36 11zM275 84v156q-12 -6 -49 -23t-41 -19q-31 -14 -46 -31t-15 -43q0 -35 22.5 -55.5t48.5 -20.5q19 0 42 10.5t38 25.5z" /></g><g transform="matrix(1.25,0,0,-1.25,90,90)"><path d="m 47.1,70.93 11.14,0" style="fill:none;stroke:#000000;stroke-width:0.68000001;stroke-linecap:butt;stroke-linejoin:miter;stroke-miterlimit:10;stroke-opacity:1;stroke-dasharray:none" /></g><g transform="matrix(.017,-0,0,-.017,148.875,14.138)"><path id="x6D" d="M797 0h-214v26q46 5 58 17.5t12 63.5v167q0 116 -88 116q-48 0 -112 -52q3 -18 3 -42v-195q0 -46 11 -58t53 -17v-26h-214v26q48 5 59.5 17t11.5 60v172q0 115 -88 115q-47 0 -109 -52v-235q0 -47 10 -59.5t48 -17.5v-26h-211v26q50 5 62.5 17t12.5 60v207q0 48 -9 59.5&#xA;t-52 18.5v23q79 14 139 41v-81q3 2 29 20.5t44 29.5q45 28 81 28t66 -22t46 -61q25 20 83 57q39 26 76 26q59 0 93 -40t34 -113v-193q0 -49 10.5 -60.5t54.5 -16.5v-26z" /></g></svg>, while the results from mixed mode I/II fracture experiments with cracks arbitrarily oriented in the plane of the film compared very well with theoretical predictions.

K. N. Jonnalagadda

I. Chasiotis

Strength and Fracture Resistance of Amorphous Diamond-Like Carbon Films for MEMS

The atomic bonding configuration of ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films prepared by pulsed laser ablation of graphite in a hydrogen atmosphere was examined by near-edge X-ray absorption fine structure spectroscopy. The measured spectra were decomposed with simple component spectra, and they were analyzed in detail. As compared to the a-C:H films deposited at room substrate-temperature, the UNCD/a-C:H and nonhydrogenated amorphous carbon (a-C) films deposited at a substrate-temperature of <svg style="vertical-align:-0.17555pt;width:38.450001px;" id="M1" height="11.225" version="1.1" viewBox="0 0 38.450001 11.225" width="38.450001"  xmlns="http://www.w3.org/2000/svg">
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</svg> exhibited enhanced <svg style="vertical-align:-0.16302pt;width:15.975px;" id="M2" height="11.7375" version="1.1" viewBox="0 0 15.975 11.7375" width="15.975"  xmlns="http://www.w3.org/2000/svg">
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</svg> and <svg style="vertical-align:-0.17554pt;width:55.875px;" id="M3" height="11.75" version="1.1" viewBox="0 0 55.875 11.75" width="55.875"  xmlns="http://www.w3.org/2000/svg">
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</svg> peaks. At the elevated substrate-temperature, the <svg style="vertical-align:-0.16302pt;width:15.975px;" id="M4" height="11.7375" version="1.1" viewBox="0 0 15.975 11.7375" width="15.975"  xmlns="http://www.w3.org/2000/svg">
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</svg> and <svg style="vertical-align:-0.17554pt;width:55.875px;" id="M5" height="11.75" version="1.1" viewBox="0 0 55.875 11.75" width="55.875"  xmlns="http://www.w3.org/2000/svg">
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				<tspan style="font-size: 12.50px; " x="23.843222" y="0">C</tspan>
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</svg> bonds formation is enhanced while the <svg style="vertical-align:-0.13794pt;width:15.6375px;" id="M6" height="11.7" version="1.1" viewBox="0 0 15.6375 11.7" width="15.6375"  xmlns="http://www.w3.org/2000/svg">
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</svg>C&#x2013;H and <svg style="vertical-align:-0.13794pt;width:15.6375px;" id="M7" height="11.7" version="1.1" viewBox="0 0 15.6375 11.7" width="15.6375"  xmlns="http://www.w3.org/2000/svg">
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</svg>C&#x2013;C bonds formation is suppressed. The UNCD/a-C:H film showed a larger <svg style="vertical-align:-0.13794pt;width:15.6375px;" id="M8" height="11.7" version="1.1" viewBox="0 0 15.6375 11.7" width="15.6375"  xmlns="http://www.w3.org/2000/svg">
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</svg>C&#x2013;C peak than the a-C film deposited at the same elevated substrate-temperature in vacuum. We believe that the intense <svg style="vertical-align:-0.13794pt;width:15.6375px;" id="M9" height="11.7" version="1.1" viewBox="0 0 15.6375 11.7" width="15.6375"  xmlns="http://www.w3.org/2000/svg">
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</svg>C&#x2013;C peak is evidently responsible for UNCD crystallites existence in the film.

Shinya Ohmagari

Tsuyoshi Yoshitake

Akira Nagano

Sausan AL-Riyami

Ryota Ohtani

Hiroyuki Setoyama

Eiichi Kobayashi

Kunihito Nagayama

Near-Edge X-Ray Absorption Fine Structure of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Films Prepared by Pulsed Laser Deposition

We have synthesized Pd-filled carbon nanotubes (CNTs) oriented perpendicular to Si substrates using a microwave plasma-enhanced chemical vapor deposition (MPECVD) for the application of scanning probe microscopy (SPM) tip. Prior to the CVD growth, Al thin film (10&#x2009;nm) was coated on the substrate as a buffer layer followed by depositing a <svg     style="vertical-align:-0.1638pt;width:44.025002px;" id="M1" height="11.125" version="1.1" viewBox="0 0 44.025002 11.125" width="44.025002"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg>&#x2009;nm-thick Pd film as a catalyst. The diameter and areal density of CNTs grown depend largely on the initial Pd thickness. Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) images clearly show that Pd is successfully encapsulated into the CNTs, probably leading to higher conductivity. Using optimum growth conditions, Pd-filled CNTs are successfully grown on the apex of the conventional SPM cantilever.

Tomokazu Sakamoto

Chien-Chao Chiu

Kei Tanaka

Masamichi Yoshimura

Kazuyuki Ueda

Growth of Pd-Filled Carbon Nanotubes on the Tip of Scanning Probe Microscopy

The molecular properties and surface morphology of undoped and N-doped ultra-nanocrystalline diamond (UNCD) films deposited by microwave plasma CVD with addition of nitrogen are investigated with various spectroscopic techniques. The results of spatially resolved Raman scattering, ATR/FT-IR and XPS spectra show more amorphous and <svg     style="vertical-align:-3.27599pt;width:21.525px;" id="M1" height="19.924999" version="1.1" viewBox="0 0 21.525 19.924999" width="21.525"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg>/<svg     style="vertical-align:-3.27599pt;width:21.525px;" id="M2" height="19.924999" version="1.1" viewBox="0 0 21.525 19.924999" width="21.525"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg> ratio characteristics in N-doped UNCD films. The surface morphology in AFM scans shows larger nanocrystalline diamond clusters in N-doped UNCD films. Incorporation of nitrogen into UNCD films has promoted an increase of amorphous <svg     style="vertical-align:-3.27599pt;width:21.525px;" id="M3" height="19.924999" version="1.1" viewBox="0 0 21.525 19.924999" width="21.525"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg>-bonded carbons in the grain boundaries and the size of nanocrystalline diamond grains that are well correlated to the reported enhancement of conductivity and structural changes of UNCD films.

Chien-Chung Teng

Shin-Min Song

Chien-Min Sung

Chhiu-Tsu Lin

Structural Transformation upon Nitrogen Doping of Ultrananocrystalline Diamond Films by Microwave Plasma CVD

Direct and facile method to make carbon nanotube (CNT) tips for scanning tunneling microscopy (STM) is presented. Cobalt (Co) particles, as catalysts, are electrochemically deposited on the apex of tungsten (W) STM tip for CNT growth. It is found that the quantity of Co particles is well controlled by applied DC voltage, concentration of catalyst solution, and deposition time. Using optimum growth condition, CNTs are successfully synthesized on the tip apex by catalyst-assisted microwave-enhanced chemical vapor deposition (CA-MPECVD). A HOPG surface is clearly observed at an atomic scale using the present CNT-STM tip.

Fa-Kuei Tung

Direct Fabrication of Carbon Nanotubes STM Tips by Liquid Catalyst-Assisted Microwave Plasma-Enhanced Chemical Vapor Deposition

Optical emission spectroscopy was used to study pulsed laser ablation of graphite in a hydrogen atmosphere wherein ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon  (a-C:H)  composite films were grown on heated substrates. Time-resolved photographs of a plume that expanded from a laser-irradiation spot toward a substrate were taken using a high-speed ICCD camera equipped with narrow-bandpass filters. While the emissions from C atoms and <svg style="vertical-align:-3.13504pt;width:16.637501px;" id="M1" height="14.6" version="1.1" viewBox="0 0 16.637501 14.6" width="16.637501"  xmlns="http://www.w3.org/2000/svg">
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</svg> dimers lasted above the laser-irradiation spot on the target, the emission from  <svg style="vertical-align:-0.17554pt;width:18.6625px;" id="M2" height="12.7875" version="1.1" viewBox="0 0 18.6625 12.7875" width="18.6625"  xmlns="http://www.w3.org/2000/svg">
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</svg> ions lasted above the substrate surface for approximately 7 microseconds, although the emission lifetime of species is generally approximately 10 nanoseconds. This implies that <svg style="vertical-align:-0.17554pt;width:18.6625px;" id="M3" height="12.7875" version="1.1" viewBox="0 0 18.6625 12.7875" width="18.6625"  xmlns="http://www.w3.org/2000/svg">
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</svg> ions actively collided with each other above the substrate surface for such a long time. We believe that the keys to UNCD growth in PLD are the supply of highly energetic carbon species at a high density to the substrate and existence of atomic hydrogen during the growth.

Kenji Hanada

Takashi Nishiyama

Time-Resolved Observation of Deposition Process of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films in Pulsed Laser Deposition

Carbon-based electronic materials have received much attention since the discovery and elucidation of the properties of the nanotube, fullerene allotropes, and conducting polymers. Amorphous carbon, graphite, graphene, and diamond have also been the topics of intensive research. In accordance with this interest, we herein provide the details of a novel and facile method for synthesis of poly(hydridocarbyne) (PHC), a preceramic carbon polymer reported to undergo a conversion to diamond-like carbon (DLC) upon pyrolysis and also provide electrical characterization after low-temperature processing and pyrolysis of this material. The results indicate that the strongly insulating polymer becomes notably conductive in bulk form upon heating and contains interspersed micro- and nanostructures, which are the subject of ongoing research.

Aaron M. Katzenmeyer

Yavuz Bayam

Logeeswaran VJ

Michael W. Pitcher

Yusuf Nur

Semih Seyyido&#287;lu

Levent K. Toppare

A. Alec Talin

Huilan Han

Cristina E. Davis

M. Saif Islam

Poly(hydridocarbyne) as Highly Processable Insulating Polymer Precursor to Micro/Nanostructures and Graphite Conductors

Carbon nanotubes (CNTs) have been successfully grown on the tip apex of an atomic force microscopy (AFM) cantilever by microwave plasma-enhanced chemical vapor deposition (MPECVD). Both scanning electron microscopy (SEM) and transmission electron microscopy (TEM) observations reveal that the diameter of the CNTs is <svg     style="vertical-align:-0.1638pt;width:31.137501px;" id="M1" height="11.125" version="1.1" viewBox="0 0 31.137501 11.125" width="31.137501"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg>&#x2009;nm and the magnetic particles with diameter of <svg     style="vertical-align:-0.1638pt;width:31.137501px;" id="M2" height="11.125" version="1.1" viewBox="0 0 31.137501 11.125" width="31.137501"  xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg">
	
		
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</svg>&#x2009;nm, which was used as catalyst for the CNT growth, exist on the top. This CNT probe has been applied to magnetic force microscopy (MFM) on the ultrahigh-density magnetic recording media with 1200&#x2009;kilo flux change per inch (kfci).

High-Resolution Magnetic Force Microscopy Using Carbon Nanotube Probes Fabricated Directly by Microwave Plasma-Enhanced Chemical Vapor Deposition

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<p><em>Journal of Nanomaterials</em> publishes research on nanoscale and nanostructured materials with an emphasis on synthesis, processing, characterization, and the applications of nanomaterials.</p>


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<p>Chief Editor Stefano Bellucci is Professor of Theoretical Physics at the National Institute for Nuclear Physics in Frascati, Italy. His research interests include&nbsp;nanoscience and nanotechnology, nanocarbon-based composites, and the biomedical applications of nanomaterials.</p>


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Journal of Nanomaterials

Diamond and Related Nanomaterials for MEMS/NEMS Applications

Diamond and Related Nanomaterials for MEMS/NEMS Applications

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