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Journal of Nanomaterials
Volume 2009, Article ID 936863, 11 pages
Research Article

Origin of the Difference in the Resistivity of As-Grown Focused-Ion- and Focused-Electron-Beam-Induced Pt Nanodeposits

1Instituto de Ciencia de Materiales de Aragón, Facultad de Ciencias, Consejo Superior de Investigaciones Científicas (CSIC), Universidad de Zaragoza, 50009 Zaragoza, Spain
2Departamento de Fìsica de la Materia Condensada, Facultad de Ciencias, Universidad de Zaragoza, 50009 Zaragoza, Spain
3Instituto de Nanociencia de Aragón, Universidad de Zaragoza, 50009 Zaragoza, Spain

Received 20 October 2008; Revised 19 January 2009; Accepted 3 February 2009

Academic Editor: Xuedong Bai

Copyright © 2009 J. M. De Teresa et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We study the origin of the strong difference in the resistivity of focused-electron- and focused-Ga-ion-beam-induced deposition (FEBID and FIBID, resp.) of Pt performed in a dual beam equipment using as the precursor gas. We have performed in-situ and ex-situ resistance measurements in both types of nanodeposits, finding that the resistivity of Pt by FEBID is typically four orders of magnitude higher than Pt by FIBID. In the case of Pt by FEBID, the current-versus-voltage dependence is nonlinear and the resistance-versus-temperature behavior is strongly semiconducting, whereas Pt by FIBID shows linear current-versus-voltage dependence and only slight temperature dependence. The microstructure, as investigated by high-resolution transmission electron microscopy, consists in all cases of Pt single crystals with size about 3 nm embedded in an amorphous carbonaceous matrix. Due to the semiconducting character of the carbon matrix, which is the main component of the deposit, we propose that the transport results can be mapped onto those obtained in semiconducting materials with different degrees of doping. The different transport properties of Pt by FEBID and FIBID are attributed to the higher doping level in the case of FIBID, as given by composition measurements obtained with energy-dispersive X-ray microanalysis.