Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited <svg style="vertical-align:-4.61348pt;width:51.412498px;" id="M1" height="21.025" version="1.1" viewBox="0 0 51.412498 21.025" width="51.412498" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(1.25,0,0,-1.25,0,21.025)"><g transform="translate(72,-55.18)"><text transform="matrix(1,0,0,-1,-71.95,59.83)"><tspan style="font-size: 17.93px; " x="0" y="0">R</tspan><tspan style="font-size: 17.93px; " x="11.710249" y="0">u</tspan><tspan style="font-size: 17.93px; " x="20.676748" y="0">O</tspan></text><text transform="matrix(1,0,0,-1,-38.33,55.34)"><tspan style="font-size: 12.55px; " x="0" y="0">𝑥</tspan></text></g></g></svg> Metal Nanocrystal Capacitors

<table>Variation of diameter and density of the <svg height="14.7" id="M47" style="vertical-align:-3.21404pt" version="1.1" viewbox="0 0 36.0625 14.7" width="36.0625" xmlns="http://www.w3.org/2000/svg">
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<text transform="matrix(1,0,0,-1,-71.95,63.5)">
<tspan style="font-size: 12.50px; " x="0" y="0">R</tspan>
<tspan style="font-size: 12.50px; " x="8.1644592" y="0">u</tspan>
<tspan style="font-size: 12.50px; " x="14.415959" y="0">O</tspan>
</text>
<text transform="matrix(1,0,0,-1,-48.51,60.37)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑥</tspan>
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</g>
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</svg> metal nanocrystals with different annealing temperatures from 850–1000°C. A single <svg height="14.7" id="M48" style="vertical-align:-3.21404pt" version="1.1" viewbox="0 0 36.0625 14.7" width="36.0625" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.7)">
<g transform="translate(72,-60.24)">
<text transform="matrix(1,0,0,-1,-71.95,63.5)">
<tspan style="font-size: 12.50px; " x="0" y="0">R</tspan>
<tspan style="font-size: 12.50px; " x="8.1644592" y="0">u</tspan>
<tspan style="font-size: 12.50px; " x="14.415959" y="0">O</tspan>
</text>
<text transform="matrix(1,0,0,-1,-48.51,60.37)">
<tspan style="font-size: 8.75px; " x="0" y="0">𝑥</tspan>
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</svg> nanocrystal is shown in the inset for each annealing temperature.</table>

Journal of Nanomaterials

fig5

Figure 5

Figure 5: Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited <svg style="vertical-align:-4.61348pt;width:51.412498px;" id="M1" height="21.025" version="1.1" viewBox="0 0 51.412498 21.025" width="51.412498" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(1.25,0,0,-1.25,0,21.025)"><g transform="translate(72,-55.18)"><text transform="matrix(1,0,0,-1,-71.95,59.83)"><tspan style="font-size: 17.93px; " x="0" y="0">R</tspan><tspan style="font-size: 17.93px; " x="11.710249" y="0">u</tspan><tspan style="font-size: 17.93px; " x="20.676748" y="0">O</tspan></text><text transform="matrix(1,0,0,-1,-38.33,55.34)"><tspan style="font-size: 12.55px; " x="0" y="0">𝑥</tspan></text></g></g></svg> Metal Nanocrystal Capacitors 

Journal of Nanomaterials

Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited RuO𝑥 Metal Nanocrystal Capacitors

Figure 5

Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited Metal Nanocrystal Capacitors