Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited <svg style="vertical-align:-4.61348pt;width:51.412498px;" id="M1" height="21.025" version="1.1" viewBox="0 0 51.412498 21.025" width="51.412498" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(1.25,0,0,-1.25,0,21.025)"><g transform="translate(72,-55.18)"><text transform="matrix(1,0,0,-1,-71.95,59.83)"><tspan style="font-size: 17.93px; " x="0" y="0">R</tspan><tspan style="font-size: 17.93px; " x="11.710249" y="0">u</tspan><tspan style="font-size: 17.93px; " x="20.676748" y="0">O</tspan></text><text transform="matrix(1,0,0,-1,-38.33,55.34)"><tspan style="font-size: 12.55px; " x="0" y="0">𝑥</tspan></text></g></g></svg> Metal Nanocrystal Capacitors

<table>Equivalent oxide thickness (EOT) versus different annealing temperatures.</table>

Journal of Nanomaterials

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Figure 9

Figure 9: Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited <svg style="vertical-align:-4.61348pt;width:51.412498px;" id="M1" height="21.025" version="1.1" viewBox="0 0 51.412498 21.025" width="51.412498" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(1.25,0,0,-1.25,0,21.025)"><g transform="translate(72,-55.18)"><text transform="matrix(1,0,0,-1,-71.95,59.83)"><tspan style="font-size: 17.93px; " x="0" y="0">R</tspan><tspan style="font-size: 17.93px; " x="11.710249" y="0">u</tspan><tspan style="font-size: 17.93px; " x="20.676748" y="0">O</tspan></text><text transform="matrix(1,0,0,-1,-38.33,55.34)"><tspan style="font-size: 12.55px; " x="0" y="0">𝑥</tspan></text></g></g></svg> Metal Nanocrystal Capacitors 

Journal of Nanomaterials

Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited RuO𝑥 Metal Nanocrystal Capacitors

Figure 9

Temperature-Dependent Physical and Memory Characteristics of Atomic-Layer-Deposited Metal Nanocrystal Capacitors