Characterisation of C–F Polymer Film Formation on the Air-Bearing Surface Etched Sidewall of Fluorine-Based Plasma Interacting with AL₂O₃–TiC Substrate

Table 1

Summary of % area fractions on C1s peak detected at the analysis points.

Point	% Area fraction						% Crosslink
	Ti–C	C–C	–C–CF𝑥	–CF	–CF2	–CF3
1	2.09	14.77	19.21	29.22	24.61	10.30	64.34
2	0.53	8.43	29.31	26.22	22.54	12.97	64.30