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Journal of Sensors
Volume 2015 (2015), Article ID 124058, 8 pages
http://dx.doi.org/10.1155/2015/124058
Research Article

Wireless Passive Temperature Sensor Realized on Multilayer HTCC Tapes for Harsh Environment

1Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
2Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
3National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China

Received 20 June 2014; Revised 1 September 2014; Accepted 1 September 2014

Academic Editor: Gongfa Li

Copyright © 2015 Qiulin Tan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

A wireless passive temperature sensor is designed on the basis of a resonant circuit, fabricated on multilayer high temperature cofired ceramic (HTCC) tapes, and measured with an antenna in the wireless coupling way. Alumina ceramic used as the substrate of the sensor is fabricated by lamination and sintering techniques, and the passive resonant circuit composed of a planar spiral inductor and a parallel plate capacitor is printed and formed on the substrate by screen-printing and postfiring processes. Since the permittivity of the ceramic becomes higher as temperature rises, the resonant frequency of the sensor decreases due to the increasing capacitance of the circuit. Measurements on the input impedance versus the resonant frequency of the sensor are achieved based on the principle, and discussions are made according to the exacted relative permittivity of the ceramic and quality factor () of the sensor within the temperature range from 19°C (room temperature) to 900°C. The results show that the sensor demonstrates good high-temperature characteristics and wide temperature range. The average sensitivity of the sensor with good repeatability and reliability is up to 5.22 KHz/°C. It can be applied to detect high temperature in harsh environment.