| Reference | Fabrication method | (mm) | Λ (µm) |
| Slavík [19] | CO2 laser | 25–90 | 415 | Wang [20] | CO2 laser | 2.8 | | Rao and Zhu [21] | CO2 laser | 30 | | Vengsarkar et al. [22] | KrF laser | 25.4 | | Rao et al. [23] | CO2 laser | 40 | 2000 | Lan et al. [24] | CO2 laser | 46 | | Oh et al. [25] | CO2 laser | 42, 47, 50 | | Li et al. [26] | fs laser | 25.2 | 436 | Han et al. [27] | UV light | 20 | 400 | Zhang et al. [28] | Laser | 22.5 and 23 | 643, 418, 428 | Rindorf and Bang [29] | CO2 laser | 49.2, 44.4, 37.2, 34.8 | 820, 740, 620, 580 | Allsop et al. [30] | | 20 | 206 | Allsop et al. [31] | | 55, 150 | 325, 111 | Shi et al. [32] | | 13 | 435 | Wang and Rao [33] | CO2 laser | 20 | | Rao et al. [34] | CO2 laser | 19.6 | 437 | Wang and Rao [35] | CO2 laser | 27 | | Bhatia [6, 36] | UV | 10 | 280 | Nam et al. [9] | Electric arc | 2 | 500 | Duan et al. [7] | fs laser | 34 | 570 |
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