Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/js/volume-2021/5580390/figures/5580390.fig.0015a.svgz" name="5580390.fig.0015a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Previous microstructure</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/js/volume-2021/5580390/figures/5580390.fig.0015b.svgz" name="5580390.fig.0015b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Optimized microstructure</td></tr></table>

Journal of Sensors

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Figure 15

Figure 15: Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone 