Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

Table 1

The geometry parameters of the microstructure.

Parameters (μm)	1	2
The length of beam ()	1000	500
The side length of center block (2a)	600	600
The width of beam ()	120	80
The thickness of beam ()	20	12
The thickness of center block ()	20	12
The height of rigid cylinder ()	5000	4000
The radius of rigid cylinder ()	100	100