140976.fig.003a
(a)
140976.fig.003b
(b)
Figure 3: Inner (a) and outer (b) view of our modular medium-size PLD chamber with in-situ-spectroscopic ellipsometer Woollam M 2000 and modular 3-inch diameter heater (see Figure 2) and target manipulator. The laser entrance window is top left under 45° incidence on the target. Additional shields (not included here) may reduce the unavoidable coating of the SUPRASIL plan parallel plate used as laser entrance. The position of the whole substrate heater (left photo) can be adjusted parallel to the substrate surface in order to change the offset distance for the large-area “offset” PLD (see Figure 1).