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Shock and Vibration
Volume 2014 (2014), Article ID 542023, 9 pages
Research Article

Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias

Mechanical Engineering Department, University of Texas-Pan American, Edinburg, TX 78539, USA

Received 17 September 2013; Accepted 12 March 2014; Published 28 April 2014

Academic Editor: Mohammad Elahinia

Copyright © 2014 Dumitru I. Caruntu and Kyle N. Taylor. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC frequency is near natural frequency. This drives the resonator into nonlinear parametric resonance. The method of multiple scales (MMS) is used to solve the dimensionless differential equation of motion of the resonator and find the steady-state solutions. The reduced order model (ROM) method is used to validate the results obtained using MMS. The effect of the soft DC voltage (bias) component on the frequency response is reported. It is shown that the DC bias changes the subcritical Hopf bifurcation into a cyclic fold bifurcation and shifts the bifurcation point (where the system loses stability) to lower frequencies and larger amplitudes.