Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias

Figure 4

Creation of escape band due to DC bias. AC frequency is near natural frequency. (a) Amplitude-frequency response and (b) phase-frequency response. MMS is used. AC voltage 𝛿_0𝐴 is relatively small (in this case half of the one used in Figures 2 and 3). In each figure two cases are shown: (i) zero DC bias (black lines): 𝛿_0𝐷=0.0 and there is no escape band and (ii) nonzero DC bias (grey lines): 𝛿_0𝐷=0.0003 and an escape band is created. The AC voltage, fringe, and damping are 𝛿_0𝐴=0.05, 𝑓=0.26, and 𝑐=0.01, respectively.

(a)

(b)