Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

Table 1

Geometric and physical parameters of the beam.

𝐿	𝑏	ℎ	𝑑	𝜌	𝐸	𝜀	ℎ𝑑
510 μm	100 μm	1.5 μm	1.18 μm	2300 Kg/m^3	166 GPa	8.851  10^−12 F/m	0.236 μm