Research Article

Systematic Investigation of Gettering Effects on 4th Row Element Impurities in Si by Dopant Atoms

Table 1

Binding energy of B to Fe, Co, Ni, and Cu atoms.

ā€‰(eV)

Fe-BThis work0.48
0.64 (Cal. [4]), 0.47ā€“0.73 (Exp.[9, 10])

Co-BThis work0.64
0.65 (Cal. [4]), 0.61 (Exp. [11])

Ni-BThis work0.36
0.44 (Cal. [4]), 0.52 (Exp. [12])

Cu-BThis work0.61
0.57 (Cal. [4]), 0.43 (Exp. [9, 10])