Research Article
Systematic Investigation of Gettering Effects on 4th Row Element Impurities in Si by Dopant Atoms
Table 1
Binding energy
of B to Fe, Co, Ni, and Cu atoms.
| | | ā(eV) |
| Fe-B | This work | 0.48 | 0.64 (Cal. [4]), 0.47ā0.73 (Exp.[9, 10]) |
| Co-B | This work | 0.64 | 0.65 (Cal. [4]), 0.61 (Exp. [11]) |
| Ni-B | This work | 0.36 | 0.44 (Cal. [4]), 0.52 (Exp. [12]) |
| Cu-B | This work | 0.61 | 0.57 (Cal. [4]), 0.43 (Exp. [9, 10]) |
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