Fabrication of  Si<sub>3</sub>N<sub>4</sub> Nanocrystals and Nanowires Using PECVD

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Advances in Materials Science and Engineering

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Figure 4

Figure 4: Fabrication of  Si<sub>3</sub>N<sub>4</sub> Nanocrystals and Nanowires Using PECVD 

Advances in Materials Science and Engineering

Fabrication of Si3N4 Nanocrystals and Nanowires Using PECVD

Figure 4

Fabrication of Si₃N₄ Nanocrystals and Nanowires Using PECVD