Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

<table>Changes in friction coefficients under ambient air with bias voltage of (a) 0 kV (b) <svg height="4.8874998" id="M39" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 10.1 4.8874998" width="10.1" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,4.825)"><path d="M535 230h-483v50h483v-50z" id="x2212"></path></g>
</svg>5 kV.</table>

Advances in Materials Science and Engineering

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Figure 4

Figure 4: Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method 