Research Article
Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method
Figure 5
Wear scar micrographs on SUS440C balls with C/S flow-rate ratio of (a) 1 : 2 and (b) 2 : 1 at bias voltage of 5 kV under ambient air.
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(a) C/S = 1 : 2, FC = 0.05 at 6000 cycles |
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(b) C/S = 2 : 1, FC = 0.13 at 6000 cycles |
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