Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="958581.fig.007a" src="https://static.hindawi.com/articles/amse/volume-2010/958581/figures/958581.fig.007a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>C/S = 1 : 2, FC = 0.13 at 3250 cycles</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="958581.fig.007b" src="https://static.hindawi.com/articles/amse/volume-2010/958581/figures/958581.fig.007b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>C/S = 1 : 2, FC = 0.03 at 6000 cycles</td></tr></table></td></tr></table>

<table>Wear scar micrographs on SUS440C balls under (a) ambient air, (b) high vacuum as bias voltage of 0 kV.</table>

Advances in Materials Science and Engineering

fig7

Figure 7

Figure 7: Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method 