Research Article
Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method
Table 1
Deposition conditions for S-DLC films, CH-DLC films, and DLC-SP film.
| Sample no. | Bias voltages (kV) | Gas flow-rate ratios (C2H2 : SF6) or (C/S) | RF power (W) | Deposition pressure (Pa) |
| S-DLC 1 | 0 | 2 : 1 | 300 | 2 | S-DLC 2 | 0 | 1 : 1 | 300 | 2 | S-DLC 3 | 0 | 1 : 2 | 300 | 2 | S-DLC 4 | 5 | 2 : 1 | 300 | 2 | S-DLC 5 | 5 | 1 : 1 | 300 | 2 | S-DLC 6 | 5 | 1 : 2 | 300 | 2 | CH-DLC 1 | 0 | C2H2 | 300 | 2 | CH-DLC 2 | 5 | C2H2 | 300 | 2 | DLC-SP 1 | DLC-SP film/target; C/pressure; 3 Pa/RF power; 500 W/gas; Ar |
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