Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

Table 3

Internal stress values of S-DLC films as a function of bias voltages and C/S flow-rate ratios.

Sample no.	Bias voltages (kV)	C/S flow-rate ratios	Internal stress (GPa)
S-DLC 1	0	2 : 1	1.10
S-DLC 2	0	1 : 1	1.03
S-DLC 3	0	1 : 2	1.05
S-DLC 4	−5	2 : 1	0.93
S-DLC 5	−5	1 : 1	0.79
S-DLC 6	−5	1 : 2	0.40