Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method

<table class="table-group" id="tab4"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td align="left">Bond type</td><td align="center">Bond strength (eV)</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td align="left">C-H</td><td align="center">4.28</td></tr><tr><td align="left">C-F</td><td align="center">5.06</td></tr><tr><td align="left">C-S</td><td align="center">5.99</td></tr><tr><td align="left">C-C</td><td align="center">6.29</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Bond strengths in diatomic molecules [<a href="/journals/amse/2010/958581/#B19">19</a>].

Advances in Materials Science and Engineering

tab4

Table 4

Table 4: Deposition and Tribological Properties of Sulfur-Doped DLC Films Deposited by PBII Method 