High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM

Figure 17

Part of the secondary ion mass spectrum from the multilayer zinc oxide/aluminium oxide ALD dataset shown in Figure 15. The red trace is a fit to boron with natural isotopic abundance, scaled and offset to the ¹¹B⁺ peak. The roughness in the baseline, and the apparent broad peaks below 10 Th are due to electrical interference from the extraction pulse (boron rich samples show the expected isotope ratio more clearly). There are no possible isobaric interferences for boron, so the identification is unambiguous. The fitted ¹⁰B signal corresponds to about 350 detected ions in total.