Hydrogen Charging Effects in Pd/Ti/TiO₂/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

Figure 1

Measured (markers) and fitted (red line) RBS spectra for (a) Pd/TiO₂/Ti and (b) Pd/Ti/TiO₂/Ti films deposited on Si (111).

(a)

(b)