Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods

<table>SIMS profiles for the sample Ti/TiO<sub>2</sub>/Ti/Si before (a) and after (b) hydrogen charging.</table>

Advances in Materials Science and Engineering

Figure 7: Hydrogen Charging Effects in Pd/Ti/TiO<sub>2</sub>/Ti Thin Films Deposited on Si(111) Studied by Ion Beam Analysis Methods 