Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

<table>Comparison of a measured mass spectrum with simulated Mo signals resulting from the mechanism <svg height="14.3125" id="M56" style="vertical-align:-0.16379pt" version="1.1" viewbox="0 0 112.6625 14.3125" width="112.6625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg>. The peak of <sup>100</sup>Mo directly overlaps with the As peak.</table>

Advances in Materials Science and Engineering

fig12

Figure 12

Figure 12: Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation 