Nonstoichiometry in <svg style="vertical-align:-7.6086pt;width:60.9375px;" id="M1" height="24.725" version="1.1" viewBox="0 0 60.9375 24.725" width="60.9375" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,0,0,-.022,.062,15.188)"><path id="x54" d="M592 498l-30 -3q-13 63 -31 89q-13 19 -33.5 25.5t-75.5 6.5h-70v-493q0 -60 16 -75.5t86 -19.5v-28h-286v28q68 4 83.5 19.5t15.5 75.5v493h-62q-60 0 -83 -7t-33 -24q-12 -17 -32 -90h-29q10 116 12 180h20q10 -16 21 -20.5t34 -4.5h395q19 0 28.5 5t21.5 20h21
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q13 28 43 28q18 0 30 -15.5t12 -39.5z" /></g></svg> Studied by Ion Beam Methods and Photoelectron Spectroscopy

<table>Typical overall XPS spectrum for a <svg height="18.7875" id="M239" style="vertical-align:-5.76984pt" version="1.1" viewbox="0 0 46.387501 18.7875" width="46.387501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,11.538)"><path d="M592 498l-30 -3q-13 63 -31 89q-13 19 -33.5 25.5t-75.5 6.5h-70v-493q0 -60 16 -75.5t86 -19.5v-28h-286v28q68 4 83.5 19.5t15.5 75.5v493h-62q-60 0 -83 -7t-33 -24q-12 -17 -32 -90h-29q10 116 12 180h20q10 -16 21 -20.5t34 -4.5h395q19 0 28.5 5t21.5 20h21
q2 -89 11 -177z" id="x54"></path></g><g transform="matrix(.017,0,0,-.017,8.868,11.538)"><path d="M135 536q-20 0 -35 15.5t-15 35.5q0 22 15 37t36 15t35.5 -15t14.5 -37q0 -21 -15 -36t-36 -15zM252 0h-220v26q48 5 59 17t11 63v206q0 47 -9 58t-54 18v24q78 12 142 39v-345q0 -51 11.5 -63t59.5 -17v-26z" id="x69"></path></g><g transform="matrix(.017,0,0,-.017,13.424,11.538)"><path d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" id="x4F"></path></g>
<g transform="matrix(.012,0,0,-.012,26.125,15.613)"><path d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" id="x32"></path></g><g transform="matrix(.012,0,0,-.012,31.836,15.613)"><path d="M535 230h-483v50h483v-50z" id="x2212"></path></g><g transform="matrix(.012,0,0,-.012,38.821,15.613)"><path d="M556 393q0 -39 -36 -106q-42 -78 -185 -279q-47 -66 -81 -108t-117 -135l-112 -26l-8 22q150 90 251 219q-6 136 -39 340q-8 53 -21 53q-6 0 -27 -19.5t-38 -42.5l-16 26q80 111 127 111q23 0 35 -28t20 -90q18 -137 27 -263h2q142 200 142 279q0 24 -14 48q-4 7 5 26
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</svg> thin film deposited by reactive sputtering onto Si wafer.</table>

Advances in Materials Science and Engineering

fig6

Figure 6

Figure 6: Nonstoichiometry in <svg style="vertical-align:-7.6086pt;width:60.9375px;" id="M1" height="24.725" version="1.1" viewBox="0 0 60.9375 24.725" width="60.9375" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns="http://www.w3.org/2000/svg"><g transform="matrix(.022,0,0,-.022,.062,15.188)"><path id="x54" d="M592 498l-30 -3q-13 63 -31 89q-13 19 -33.5 25.5t-75.5 6.5h-70v-493q0 -60 16 -75.5t86 -19.5v-28h-286v28q68 4 83.5 19.5t15.5 75.5v493h-62q-60 0 -83 -7t-33 -24q-12 -17 -32 -90h-29q10 116 12 180h20q10 -16 21 -20.5t34 -4.5h395q19 0 28.5 5t21.5 20h21
q2 -89 11 -177z" /></g><g transform="matrix(.022,0,0,-.022,11.674,15.188)"><path id="x69" d="M135 536q-20 0 -35 15.5t-15 35.5q0 22 15 37t36 15t35.5 -15t14.5 -37q0 -21 -15 -36t-36 -15zM252 0h-220v26q48 5 59 17t11 63v206q0 47 -9 58t-54 18v24q78 12 142 39v-345q0 -51 11.5 -63t59.5 -17v-26z" /></g><g transform="matrix(.022,0,0,-.022,17.682,15.188)"><path id="x4F" d="M381 665q131 0 226.5 -93t95.5 -239q0 -158 -96 -253t-238 -95q-137 0 -231 95t-94 238q0 142 92.5 244.5t244.5 102.5zM359 629q-89 0 -151 -74.5t-62 -208.5q0 -141 69 -233t175 -92q90 0 150.5 74t60.5 211q0 152 -69 237.5t-173 85.5z" /></g><g transform="matrix(.016,0,0,-.016,34.425,20.575)"><path id="x32" d="M412 140l28 -9q0 -2 -35 -131h-373v23q112 112 161 170q59 70 92 127t33 115q0 63 -31 98t-86 35q-75 0 -137 -93l-22 20l57 81q55 59 135 59q69 0 118.5 -46.5t49.5 -122.5q0 -62 -29.5 -114t-102.5 -130l-141 -149h186q42 0 58.5 10.5t38.5 56.5z" /></g><g transform="matrix(.016,0,0,-.016,41.957,20.575)"><path id="x2212" d="M535 230h-483v50h483v-50z" /></g><g transform="matrix(.016,0,0,-.016,51.168,20.575)"><path id="x1D466" d="M556 393q0 -39 -36 -106q-42 -78 -185 -279q-47 -66 -81 -108t-117 -135l-112 -26l-8 22q150 90 251 219q-6 136 -39 340q-8 53 -21 53q-6 0 -27 -19.5t-38 -42.5l-16 26q80 111 127 111q23 0 35 -28t20 -90q18 -137 27 -263h2q142 200 142 279q0 24 -14 48q-4 7 5 26
q13 28 43 28q18 0 30 -15.5t12 -39.5z" /></g></svg> Studied by Ion Beam Methods and Photoelectron Spectroscopy 

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Nonstoichiometry in Studied by Ion Beam Methods and Photoelectron Spectroscopy

Figure 6