Advances in Materials Science and Engineering / 2012 / Article / Tab 5

Review Article

Nonstoichiometry in Studied by Ion Beam Methods and Photoelectron Spectroscopy

Table 5

Atomic ratio O/Ti determined by four different analytical methods described in this work for thin films obtained under controllable conditions; electron microprobe EMP was performed with X-ray microanalyzer ARL SEMQ at beam parameters: 10 kV and 0.5 μA; beam diameter on the sample 5 μm.

Analytical methodO/Ti
 nm/s  nm/s

EMP1.871.92
XPS2.472.44
RBS1.932.11
NRA2.062.14

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