Nonstoichiometry in TiO_2−𝑦 Studied by Ion Beam Methods and Photoelectron Spectroscopy

Table 5

Atomic ratio O/Ti determined by four different analytical methods described in this work for TiO_2−𝑦 thin films obtained under controllable conditions; electron microprobe EMP was performed with X-ray microanalyzer ARL SEMQ at beam parameters: 10 kV and 0.5 μA; beam diameter on the sample 5 μm.

Analytical method	O/Ti
	𝑆𝑑=1.46 nm/s	𝑆𝑑=0.23 nm/s
EMP	1.87	1.92
XPS	2.47	2.44
RBS	1.93	2.11
NRA	2.06	2.14