(a) RBS spectra recorded on silicon carbide crystals irradiated at RT with 100-KeV Fe ions (grey squares) and subsequently irradiated at RT with 870-MeV Pb ions (blue symbols) at cm−2 (circles) and cm−2 (triangles). Energy of analyzing He beam: 1.4 MeV. Solid lines are fits to experimental data with the McChasy code [21, 22]. (b) Accumulated damage () as a function of depth extracted from the fits to experimental RBS data for silicon carbide crystals irradiated at RT with 100-KeV Fe ions (black line) and subsequently irradiated at RT with 870-MeV Pb ions (blue lines) at cm−2 (dashed line) and cm−2 (dash-dotted line).
