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Advances in Materials Science and Engineering
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Advances in Materials Science and Engineering
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2015
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Article
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Fig 8
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Research Article
Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
Figure 8
XPS spectra measured in point P5 (a) and points P1–P3 (b) shown in Figure
7(a)
.
(a)
(b)