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Advances in Materials Science and Engineering
Volume 2016 (2016), Article ID 4565493, 9 pages
Research Article

Ultra-High and Near-Zero Refractive Indices of Magnetron Sputtered Thin-Film Metamaterials Based on TixOy

1Vinča Institute of Nuclear Sciences, University of Belgrade, Mike Petrovića Alasa 12-14, 11001 Belgrade, Serbia
2ALBOS d.o.o., Orahovačka 19, 11000 Belgrade, Serbia
3Faculty of Technology and Technical Sciences, University St. Kliment Ohridski, 1400 Veles, Macedonia
4GL Group, Werner-von-Siemens-Straße, 86405 Meitingen, Germany
5Plasma Doo, 29 November 66/9, 1000 Skopje, Macedonia

Received 30 November 2015; Accepted 28 March 2016

Academic Editor: Somchai Thongtem

Copyright © 2016 Vukoman Jokanović et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Metamaterials based on with ultra-high and near-zero refractive indices were obtained by DC magnetron sputtering. The data on refractive indices, extinction coefficients, film thickness, and band gaps, obtained by spectroscopic ellipsometry, showed very high potential of these materials as metamaterials. Phase analysis performed by XRD revealed the presence of titanium phases with lower titanium oxidation states resulting from high concentration of oxygen vacancies, which are crucial for such extraordinary jumps and drops of refractive indices. Numerous band gaps for direct and indirect electron transitions additionally confirmed unique properties of these materials.