Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures

<div>RBS spectra for Microposit/SU-8 samples with different SU-8 2010 treatments: SB (red), PEB (green), HB (blue), and SIMNRA software fittings (dark color lines).</div>

Advances in Materials Science and Engineering

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Figure 5

Figure 5: Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures 