Topographical and Physicochemical Contrast in Photopatterned SU-8 Films for Microfabrication of Multilayer Structures

Table 2

Depth profile after PEB for different SU-8 film thicknesses.

SU-8	2001	2010	2050
Thickness (m)	2	9	40
Depth (nm)	180	450	4100
Ridges height (nm)	10	100	420