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Advances in Materials Science and Engineering
Volume 2016, Article ID 5294062, 9 pages
http://dx.doi.org/10.1155/2016/5294062
Research Article

The Study of Microwave and Electric Hybrid Sintering Process of AZO Target

The Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Nankai University, Tianjin 300457, China

Received 9 November 2015; Revised 1 February 2016; Accepted 17 February 2016

Academic Editor: Philip Eisenlohr

Copyright © 2016 Ling-yun Han et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. X. T. Hao, F. R. Zhu, K. S. Ong, and L. W. Tan, “Hydrogenated aluminium-doped zinc oxide semiconductor thin films for polymeric light-emitting diodes,” Semiconductor Science and Technology, vol. 21, no. 1, pp. 48–54, 2006. View at Publisher · View at Google Scholar · View at Scopus
  2. C. G. Granqvist, “Transparent conductors as solar energy materials: a panoramic review,” Solar Energy Materials and Solar Cells, vol. 91, no. 17, pp. 1529–1598, 2007. View at Publisher · View at Google Scholar · View at Scopus
  3. T. Minami, “Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes,” Thin Solid Films, vol. 516, no. 17, pp. 5822–5828, 2008. View at Publisher · View at Google Scholar · View at Scopus
  4. X. Yu, X. M. Yu, J. J. Zhang, and H. J. Pan, “Gradient Al-doped ZnO multi-buffer layers: effect on the photovoltaic properties of organic solar cells,” Materials Letters, vol. 161, pp. 624–627, 2015. View at Publisher · View at Google Scholar
  5. B. Hwang, Y.-K. Paek, S.-H. Yang, S. Lim, W.-S. Seo, and K.-S. Oh, “Densification of Al-doped ZnO via preliminary heat treatment under external pressure,” Journal of Alloys and Compounds, vol. 509, no. 27, pp. 7478–7483, 2011. View at Publisher · View at Google Scholar · View at Scopus
  6. T. Minami, “Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications,” Thin Solid Films, vol. 516, no. 7, pp. 1314–1321, 2008. View at Publisher · View at Google Scholar · View at Scopus
  7. G. Fang, D. Li, and B.-L. Yao, “Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering,” Vacuum, vol. 68, no. 4, pp. 363–372, 2002. View at Publisher · View at Google Scholar · View at Scopus
  8. M.-W. Wu, “Two-step sintering of aluminum-doped zinc oxide sputtering target by using a submicrometer zinc oxide powder,” Ceramics International, vol. 38, no. 8, pp. 6229–6234, 2012. View at Publisher · View at Google Scholar · View at Scopus
  9. H. Cheng, X. J. Xu, H. H. Hng, and J. Ma, “Characterization of Al-doped ZnO thermoelectric materials prepared by RF plasma powder processing and hot press sintering,” Ceramics International, vol. 35, no. 8, pp. 3067–3072, 2009. View at Publisher · View at Google Scholar · View at Scopus
  10. X.-M. Wang, X. Bai, H.-Y. Duan et al., “Preparation of Al-doped ZnO sputter target by hot pressing,” Transactions of Nonferrous Metals Society of China, vol. 21, no. 7, pp. 1550–1556, 2011. View at Publisher · View at Google Scholar · View at Scopus
  11. J. Zhang, W. Zhang, E. Zhao, and H. J. Jacques, “Study of high-density AZO ceramic target,” Materials Science in Semiconductor Processing, vol. 14, no. 3-4, pp. 189–192, 2011. View at Publisher · View at Google Scholar · View at Scopus
  12. H. Bouhamed and S. Baklouti, “Synthesis and characterization of Al2O3/Zno nanocomposite by pressureless sintering,” Powder Technology, vol. 264, pp. 278–290, 2014. View at Publisher · View at Google Scholar · View at Scopus
  13. D. E. Clark and W. H. Sutton, “Microwave processing of materials,” Annual Review of Materials Science, vol. 26, no. 1, pp. 299–331, 1996. View at Publisher · View at Google Scholar · View at Scopus
  14. J. D. Katz and R. D. Blake, “Microwave sintering of multiple alumina and composite components,” American Ceramic Society Bulletin, vol. 67, pp. 1304–1308, 1991. View at Google Scholar
  15. Z. Xie, J. Yang, X. Huang, and Y. Huang, “Microwave processing and properties of ceramics with different dielectric loss,” Journal of the European Ceramic Society, vol. 19, no. 3, pp. 381–387, 1999. View at Publisher · View at Google Scholar · View at Scopus
  16. R. F. K. Gunnewiek and R. H. G. A. Kiminami, “Effect of heating rate on microwave sintering of nanocrystalline zinc oxide,” Ceramics International, vol. 40, no. 7, pp. 10667–10675, 2014. View at Publisher · View at Google Scholar · View at Scopus
  17. A. Birnboim, D. Gershon, J. Calame et al., “Comparative study of microwave sintering of zinc oxide at 2.45, 30, and 83 GHz,” Journal of the American Ceramic Society, vol. 81, no. 6, pp. 1493–1501, 1998. View at Google Scholar · View at Scopus
  18. M. A. Janney and H. D. Kimrey, “Microstructure evolution in microwave sintered alumina,” in Ceramic Powder Science, Vol. II, pp. 919–924, American Ceramic Society, 1988. View at Google Scholar
  19. M. A. Janney, C. L. Calhoun, and H. D. Kimrey, “Microwave sintering of zirconia-8 mol% yttria,” Ceramic Transactions, vol. 21, pp. 311–318, 1991. View at Google Scholar
  20. D. C. Dibben and A. C. Metaxas, “Finite element time domain analysis of multimode applicators using edge elements,” Journal of Microwave Power & Electromagnetic Energy, vol. 29, no. 4, pp. 242–251, 1994. View at Google Scholar · View at Scopus
  21. A. K. Shukla, A. Mondal, and A. Upadhyaya, “Numerical modeling of microwave heating,” Science of Sintering, vol. 42, no. 1, pp. 99–124, 2010. View at Publisher · View at Google Scholar · View at Scopus
  22. J. C. Wurst and J. A. Nelson, “Lineal intercept technique for measuring grain size in two-phase polycrystalline ceramics,” Journal of the American Ceramic Society, vol. 55, no. 2, p. 109, 1972. View at Publisher · View at Google Scholar
  23. M. N. Rahaman, Ceramic Processing and Sintering, Taylor & Francis, New York, NY, USA, 2nd edition, 2003.
  24. M. Y. Chu, N. Rahaman, L. C. Jonghe, and R. J. Brook, “Effect of heating rate on sintering and coarsening,” Journal of the American Ceramic Society, vol. 74, no. 6, pp. 1217–1225, 1991. View at Publisher · View at Google Scholar