Research Article
Study of Large-Scale Aluminium-Doped Zinc Oxide Ceramic Targets Prepared by Slip Casting
Figure 4
SEM micrographs of AZO targets sintered at (a) 1380°C, (b) 1400°C, (c) 1420°C, and (d) 1460°C.
(a) 1380°C |
(b) 1400°C |
(c) 1420°C |
(d) 1460°C |