Table of Contents Author Guidelines Submit a Manuscript
Advances in Materials Science and Engineering
Volume 2016, Article ID 6410848, 6 pages
http://dx.doi.org/10.1155/2016/6410848
Research Article

Study of Large-Scale Aluminium-Doped Zinc Oxide Ceramic Targets Prepared by Slip Casting

TEDA Applied Physics Institute, Nankai University, Tianjin 300457, China

Received 28 December 2015; Revised 7 March 2016; Accepted 7 March 2016

Academic Editor: Pavel Lejcek

Copyright © 2016 Ling-yun Han and Yong-chun Shu. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. A. M. R. Senos, M. R. Santos, A. P. Moreira, and J. M. Vieira, “Grain boundary phenomena in the early stages of sintering of MO oxides,” in Surfaces and Interfaces of Ceramic Materials, vol. 173, pp. 553–563, Springer, Amsterdam, The Netherlands, 1989. View at Google Scholar
  2. A. M. R. Senos and J. M. Vieira, “Pore size distribution and particle rearrangement during sintering,” in Proceedings of the 3rd European Ceramic Society Conference (ECers '93), vol. 1, pp. 821–826, 1993.
  3. A. M. R. Senos, Sintering kinetics in open porosity stages of zinc oxide [Ph.D. thesis], University of Aveiro, Aveiro, Portugal, 1993.
  4. T. Senda and R. C. Bradt, “Grain growth in sintered ZnO and ZnO-Bi2O3 ceramics,” Journal of the American Ceramic Society, vol. 73, no. 1, pp. 106–114, 1990. View at Publisher · View at Google Scholar · View at Scopus
  5. M. Sida, S.-Y. Chun, N. Wakiya, K. Shinozaki, and N. Mizutani, “Effect of the sintering temperature and atmosphere on the grain growth and grain boundary phase formation of Pr-doped ZnO varistor,” Journal of the Ceramic Society of Japan, vol. 104, no. 1, pp. 44–48, 1996. View at Publisher · View at Google Scholar · View at Scopus
  6. B. Chiou and M. Chung, “Effect of copper additive on the microstructure and electrical properties of polycrystalline zinc oxide,” Journal of the American Ceramic Society, vol. 75, no. 12, pp. 3363–3368, 1992. View at Publisher · View at Google Scholar
  7. J. Han, A. M. R. Senos, and P. Q. Mantas, “Nonisothermal sintering of Mn doped ZnO,” Journal of the European Ceramic Society, vol. 19, no. 6-7, pp. 1003–1006, 1999. View at Publisher · View at Google Scholar · View at Scopus
  8. J. Han, P. Q. Mantas, and A. M. R. Senos, “Grain growth in Mn-doped ZnO,” Journal of the European Ceramic Society, vol. 20, no. 16, pp. 2753–2758, 2000. View at Publisher · View at Google Scholar · View at Scopus
  9. T. Minami, “Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications,” Thin Solid Films, vol. 516, no. 7, pp. 1314–1321, 2008. View at Publisher · View at Google Scholar · View at Scopus
  10. G. Fang, D. Li, and B.-L. Yao, “Fabrication and vacuum annealing of transparent conductive AZO thin films prepared by DC magnetron sputtering,” Vacuum, vol. 68, no. 4, pp. 363–372, 2002. View at Publisher · View at Google Scholar · View at Scopus
  11. R. Cebulla, R. Wendt, and K. Ellmer, “Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: relationships between plasma parameters and structural and electrical film properties,” Journal of Applied Physics, vol. 83, no. 2, pp. 1087–1095, 1998. View at Publisher · View at Google Scholar · View at Scopus
  12. S. Yoshioka, F. Oba, R. Huang, I. Tanaka, T. Mizoguchi, and T. Yamamoto, “Atomic structures of supersaturated ZnO–Al2O3 solid solutions,” Journal of Applied Physics, vol. 103, no. 1, Article ID 014309, 9 pages, 2008. View at Publisher · View at Google Scholar · View at Scopus
  13. J. Li, J.-H. Huang, Y.-L. Zhang, Y. Yang, W.-J. Song, and X.-M. Li, “Effects of rapid thermal annealing in different ambients on structural, electrical, and optical properties of ZnO thin films by sol-gel method,” Journal of Electroceramics, vol. 26, no. 1–4, pp. 84–89, 2011. View at Publisher · View at Google Scholar · View at Scopus
  14. J. G. Lu, S. Fujita, T. Kawaharamura et al., “Carrier concentration dependence of band gap shift in n-type ZnO:Al films,” Journal of Applied Physics, vol. 101, no. 8, Article ID 083705, 2007. View at Publisher · View at Google Scholar · View at Scopus
  15. M.-W. Wu, D.-S. Liu, and Y.-H. Su, “The densification, microstructure, and electrical properties of aluminum-doped zinc oxide sputtering target for transparent conductive oxide film,” Journal of the European Ceramic Society, vol. 32, no. 12, pp. 3265–3275, 2012. View at Publisher · View at Google Scholar · View at Scopus
  16. N. Omura, Y. Hotta, K. Sato, Y. Kinemuchi, S. Kume, and K. Watari, “Fabrication of stable Al2O3 slurries and dense green bodies using wet jet milling,” Journal of the American Ceramic Society, vol. 89, no. 9, pp. 2738–2743, 2006. View at Publisher · View at Google Scholar · View at Scopus
  17. J. Tsubaki, M. Kato, M. Miyazawa, T. Kuma, and H. Mori, “The effects of the concentration of a polymer dispersant on apparent viscosity and sedimentation behavior of dense slurries,” Chemical Engineering Science, vol. 56, no. 9, pp. 3021–3026, 2001. View at Publisher · View at Google Scholar · View at Scopus
  18. X. Li and Q. Li, “YAG ceramic processed by slip casting via aqueous slurries,” Ceramics International, vol. 34, no. 2, pp. 397–401, 2008. View at Publisher · View at Google Scholar · View at Scopus
  19. T. K. Roy, D. Bhowmick, D. Sanyal, and A. Chakrabarti, “Sintering studies of nano-crystalline zinc oxide,” Ceramics International, vol. 34, no. 1, pp. 81–87, 2008. View at Publisher · View at Google Scholar · View at Scopus
  20. J. Han, P. Q. Mantas, and A. M. R. Senos, “Densification and grain growth of Al-doped ZnO,” Journal of Materials Research, vol. 16, no. 2, pp. 459–468, 2001. View at Publisher · View at Google Scholar · View at Scopus
  21. Y. Sun, W. Xiong, C. Li, and L. Yuan, “Effect of dispersant concentration on preparation of an ultrahigh density ZnO-Al2O3 target by slip casting,” Journal of the American Ceramic Society, vol. 92, no. 9, pp. 2168–2171, 2009. View at Publisher · View at Google Scholar · View at Scopus
  22. S. J. L. Kang, Sintering: Densification, Grain Growth and Microstructure, Butterworth-Heinemann, 2005.
  23. J. Chen, Y. H. Sun, X. Lv et al., “Preparation and characterization of high-transmittance AZO films using RF magnetron sputtering at room temperature,” Applied Surface Science, vol. 317, pp. 1000–1003, 2014. View at Publisher · View at Google Scholar · View at Scopus