Research Article

Two Kinds of Hydrogen Monomers Manifested in Plasma-Exposed Silicon

Figure 2

Concentration profiles for the sample of Figure 1. (a) Solid curve is computed for the same parameters that were used in Figure 1(b), and the experimental points (circles) are rescaled to match the experimental penetration depth by Figure 1. (b) Individual components of the passivated boron.
(a)
(b)