Research Article

Distribution of Oxygen at the Ni81Fe19/Ta Interface

Table 2

XRR analysis results using IMD program [9].

SampleDensity Py (g/cm3)Density Ta (g/cm3)Roughness Py (nm)Roughness Ta (nm)Thickness Py (nm)Thickness Ta (nm)

PyTa9 ± 117 ± 11 ± 10.7 ± 0.12.0 ± 0.10.5 ± 0.1
PyTaO29 ± 17 ± 10.7 ± 0.10.4 ± 0.12.0 ± 0.11.0 ± 0.1
PyO2Ta9 ± 18 ± 10.3 ± 0.10.3 ± 0.12.0 ± 0.10.9 ± 0.1
PyO29 ± 14 ± 10.8 ± 0.10.8 ± 0.11.7 ± 0.10.4 ± 0.1

PyOx in the last line of the table.