Research Article
Distribution of Oxygen at the Ni81Fe19/Ta Interface
Table 2
XRR analysis results using IMD program [
9].
| Sample | Density Py (g/cm3) | Density Ta (g/cm3) | Roughness Py (nm) | Roughness Ta (nm) | Thickness Py (nm) | Thickness Ta (nm) |
| PyTa | 9 ± 1 | 17 ± 1 | 1 ± 1 | 0.7 ± 0.1 | 2.0 ± 0.1 | 0.5 ± 0.1 | PyTaO2 | 9 ± 1 | 7 ± 1 | 0.7 ± 0.1 | 0.4 ± 0.1 | 2.0 ± 0.1 | 1.0 ± 0.1 | PyO2Ta | 9 ± 1 | 8 ± 1 | 0.3 ± 0.1 | 0.3 ± 0.1 | 2.0 ± 0.1 | 0.9 ± 0.1 | PyO2 | 9 ± 1 | 4 ± 1 | 0.8 ± 0.1 | 0.8 ± 0.1 | 1.7 ± 0.1 | 0.4 ± 0.1 |
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PyO x in the last line of the table. |