Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer

<div>Control results in tracking a nonperiodical target with a sinusoidal disturbance.</div>

Advances in Materials Science and Engineering

Figure 11: Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer 