Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer

<div>Comparisons of the output-input characteristics of the stage with and without the feedforward control.</div>

Advances in Materials Science and Engineering

Figure 8: Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer 