Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left" rowspan="2">Tracking target</td><td class="align_center" colspan="2">Maximum absolute control errors (<i>μ</i>m)</td></tr><tr class="thead"><td class="align_center">HOB</td><td class="align_center">HOB + DOB</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">1 Hz</td><td class="align_center">0.082</td><td class="align_center">0.049</td></tr><tr><td class="align_left">100 Hz</td><td class="align_center">0.125</td><td class="align_center">0.056</td></tr><tr><td class="align_left">Nonperiodic</td><td class="align_center">0.131</td><td class="align_center">0.052</td></tr><tr><td class="align_left">Nonperiodic + disturbance</td><td class="align_center">0.259</td><td class="align_center">0.059</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Maximum absolute control errors of the proposed control methods.</div>

Advances in Materials Science and Engineering

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Table 2

Table 2: Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer 