Advances in Materials Science and Engineering / 2019 / Article / Tab 1

Research Article

Research on Hydrophobic Properties of Grating Structure on Monocrystalline Silicon Fabricated Using Micromachining

Table 1

Processing parameters of the grating structure.

Sample numberHeight of convex h (μm)Convex platform width a (μm)Spacing width b (μm)

110060300
290
3120
4150
5180
6200

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