Research on Hydrophobic Properties of Grating Structure on Monocrystalline Silicon Fabricated Using Micromachining

Table 1

Processing parameters of the grating structure.

Sample number	Height of convex h (μm)	Convex platform width a (μm)	Spacing width b (μm)
1	100	60	300
2		90
3		120
4		150
5		180
6		200