Research Article
Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling
Figure 14
Results of static analysis: (a) motion along the positive X-axis; (b) motion in a direction 45 degrees to the X-axis; (c) motion of rotational part; (d) motion of the entire structure in the θz direction.
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