Advances in Materials Science and Engineering / 2019 / Article / Fig 14

Research Article

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Figure 14

Results of static analysis: (a) motion along the positive X-axis; (b) motion in a direction 45 degrees to the X-axis; (c) motion of rotational part; (d) motion of the entire structure in the θz direction.
(a)
(b)
(c)
(d)

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