Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling

<div>(a) Cruciform connecting structure and (b) nonuniform beam.</div>

Advances in Materials Science and Engineering

fig2

Figure 2

Figure 2: Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling 

Advances in Materials Science and Engineering

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Figure 2

Design and Analysis of a Novel Piezo-Actuated XYθ_z Micropositioning Mechanism with Large Travel and Kinematic Decoupling