Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling

<div>Tested first natural frequency of the mechanism.</div>

Advances in Materials Science and Engineering

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Figure 21

Figure 21: Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling 

Advances in Materials Science and Engineering

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Figure 21

Design and Analysis of a Novel Piezo-Actuated XYθ_z Micropositioning Mechanism with Large Travel and Kinematic Decoupling