Antibacterial Activity of Visible Light-Activated TiO₂ Thin Films with Low Level of Fe Doping

Table 1

Crystallite size and roughness of TiO₂ films with different atomic ratios of Fe to Ti.

No.	a	b	c	d	e
Fe content (at%)	0	0.1	0.5	1.0	2.0
Crystal size (nm)	21.53	19.24	19.58	21.03	22.24
RMS (nm)^a	2.1	3.6	3.7	4.6	5.0

^aRMS, average roughness of TiO₂ was determined by AFM.