Research Article

The Effect of Yttrium Addition on the Microstructures and Electrical Properties of CuMn Alloy Thin Films

Figure 2

CuMn film TEM micrographs annealed at 350°C: (a) cross-section bright field, (b) selected-area electron diffraction at position A, (c) selected-area electron diffraction at position B, and (d) HRTEM micrographs at position B.