The Effect of Yttrium Addition on the Microstructures and Electrical Properties of CuMn Alloy Thin Films

Table 1

CuMnY thin-film composition prepared at DC 50 W with different RF powers sputtered onto cooper sheet.

Power (W)	DC/RF	50/60	50/80	50/100
Element (at%)	Cu	61.3	54.7	52.6
	Mn	30	29.6	27.8
	Y	8.7	15.7	19.6