Research Article

Corrosion Resistance of DLC Film-Coated SUS316L Steel Prepared by Ion Beam Enhanced Deposition

Figure 3

AFM 2D images and linear Z-axis scale bars of uncoated SUS316L (Ra = 21.80 nm) (a) and DLC coatings deposited at (b) CH4/H2 = 1 : 1, 6 h (Ra = 3.77 nm); (c) CH4/H2 = 1 : 1, 12 h (Ra = 5.63 nm); (d) CH4/H2 = 1 : 0, 6 h (Ra = 3.93 nm); (e) CH4/H2 = 1 : 0, 12 h (Ra = 7.56 nm).
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